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: Motorized Linear Stage: ZP140-(50-500)
Key Features: Non-contact direct-drive system ensures ultraprecision motion with high dynamics and reliability Extra-large, high-efficiency linear motor minimizes heat generation Ironless moving coil has no cogging for ultra smooth velocity control Ultra-quiet anti-creep crossed roller bearings assure ripple-free motion without cage migration High precision glass scale encoder provides accurate position feedback with 50 nm repeatability Sub-nm resolution with low interpolation error for outstanding speed stability and motion sensitivity No moving cables inside the stage, reduced particle generation and improved reliability

Model		ZP140-50	ZP140-100	ZP140-150	ZP140-200	ZP140-300	ZP140-400	ZP140-500
Structure Discription	Travel Range	50 mm	100 mm	150 mm	200 mm	300 mm	400 mm	500 mm
	Stage Size	120×120mm	120×120mm	120×120mm	120×120mm	120×120mm	160×160mm	160×160mm
	Bolt Size	High Precise Ball Bolt (Travel Range 4 mm)					High Precise Ball Bolt(Travel Range 5 mm)
	Travel Guide	High Precise Linear Ball Bearing
	Stepping Motor(1.8°)	42BYG					57BYG
	Main Material	Aluminum Alloy
	Surface Treatment	Black-Anodic Oxidation
	Loading Capacity	20kg		30kg				50kg
	Net Weight	2.8kg	3.4kg	4.5kg	5.2kg	6.3kg	7.2kg	8.3kg
Accuracy Description	Resolution	20μ/Pulse（Non Micro step）					25μ/Pulse（Non Micro step）
		1μ/Pulse（20 Micro step Driver in use）					1.25μ/Pulse（20 Micro step Driver in use）
	Max Speed	40mm/sec					50mm/sec
	Repeatability	5μ
	Positional Accuracy	8μ
	Straightness	5µ		6µ				8µ
	Driving Parallelism	10µ		15µ				20µ
	Pitching	25″		50″			60″
	Deflection	20″		25″			30″
	Backlash	2µ
	Lost Motion	3µ			5µ
Accessories Description	Cut Powder Brake Function (Z)
	Grating (G)
	Servo Motor (S)
	Dustproof Cover (F)