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Motorized Linear Stage: ZP110-(15-75)
Key Features: Non-contact direct-drive system ensures ultraprecision motion with high dynamics and reliability Extra-large, high-efficiency linear motor minimizes heat generation Ironless moving coil has no cogging for ultra smooth velocity control Ultra-quiet anti-creep crossed roller bearings assure ripple-free motion without cage migration High precision glass scale encoder provides accurate position feedback with 50 nm repeatability Sub-nm resolution with low interpolation error for outstanding speed stability and motion sensitivity No moving cables inside the stage, reduced particle generation and improved reliability
Model | ZP110-15 | ZP110-30 | ZP110-50 | ZP110-75 | |
Structure Description | Travel Range | 15 mm | 30 mm | 50 mm | 75 mm |
Stage Size | 65×65mm | 90×90 mm | 90×110mm | 90×110mm | |
Bolt Size | Abrasive Bolt(Travel Range 0.5 m) | Abrasive Bolt(Travel Range 1 mm) | |||
Travel Guide | High Precise Crossed Rollers | ||||
Stepping Mot(1.8°) | 42BYG | ||||
Main Material | Aluminum Alloy | ||||
Surface Treatment | Black-Anodic Oxidation | ||||
Loading Capacity | 10kg | 15kg | 20 kg | ||
Net Weight | 1.2kg | 1.25kg | 1.4kg | 1.7kg | |
Accuracy Description | Resolution | 2.5μ/Pulse(Non Micro step) | 5μ/Pulse(Non Micro step) | ||
0.125μ/Pulse(20 Micro step Driver in use) | 0.225μ/Pulse(20 Micro step Driver in use) | ||||
Max Speed | 5mm/sec | 10mm/sec | |||
Repeatability | 3μ | 5μ | |||
Positional Accuracy | 10μ | ||||
Straightness | 5µ | 8µ | 12µ | ||
Driving Parallelism | 10µ | 15µ | |||
Pitching | 25″ | ||||
Deflection | 20″ | ||||
Backlash | 2µ | ||||
Lost Motion | 2µ | ||||
Accessories Description | Limit Switch & Origin Sensor | ||||
Grating(G) | |||||
Servo Motor(S) |